查看“︁氟氧化钇”︁的源代码

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| Section2 = {{Chembox Properties
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| Density = 5.18 g/cm<sup>3</sup>
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| CrystalStruct = 四方晶系
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'''氟氧化钇'''是一种[[无机化合物]]，化学式为{{chem2|YOF}}。<ref>{{cite journal|last1=Mann|first1=A. W.|last2=Bevan|first2=D. J. M.|title=The crystal structure of stoichiometric yttrium oxyfluoride, YOF|journal=[[Acta Crystallographica]]|date=1970|volume=B26|issue=12|pages=2129–2131|doi=10.1107/S0567740870005496|url=http://scripts.iucr.org/cgi-bin/paper?S0567740870005496|access-date=16 June 2017|archive-date=2023-05-05|archive-url=https://web.archive.org/web/20230505124326/http://scripts.iucr.org/cgi-bin/paper?S0567740870005496|dead-url=no}}</ref>在一般条件下，该化合物是无色固体。<ref>{{cite book|last1=Рипан|first1=Р.|last2=Четяну|first2=И.|title=Неорганическая химия|date=1992|language=ru}}</ref>

==合成==
* 在真空中将[[氟化钇]]的水合晶体加热到900&nbsp;°C，使其分解：
:: <math>\mathsf{2YF_3\cdot 1/2H_2O \ \xrightarrow{\tau, 900^oC}\ YOF + YF_3 + 2HF }</math>
* 在800&nbsp;°C用[[过热蒸汽]]水解氟化钇：
:: <math>\mathsf{2YF_3 + H_2O \ \xrightarrow{800^oC}\ YOF + 2HF }</math>

==物理性质==
氟氧化钇会形成[[四方晶系]]的晶体。它的晶格参数是a = 0.3910&nbsp;nm，c = 0.5431&nbsp;nm。根据[[六方晶系]]，晶格参数是a = 0.38727&nbsp;nm，c = 1.897&nbsp;nm，Z = 6。

==应用==
稳定氟氧化钇用于等离子体装备的内壁。<ref>{{Cite journal|last1=Shiba|first1=Yoshinobu|title=Stable yttrium oxyfluoride used in plasma process chamber|journal=[[Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films]]|volume=35|issue=2|pages=021405|date=January 2017|doi=10.1116/1.4975143|bibcode=2017JVSTA..35b1405S}}</ref><ref>{{cite journal|last1=Tsunoura|first1=Toru|last2=Yoshida|first2=Katsumi|last3=Yano2|first3=Toyohiko|last4=Kishi|first4=Yukio|title=Fabrication, characterization, and fluorine-plasma exposure behavior of dense yttrium oxyfluoride ceramics|journal=[[Japanese Journal of Applied Physics]]|date=2 May 2017|volume=56|issue=6S2|pages=06HC02|doi=10.7567/JJAP.56.06HC02|bibcode=2017JaJAP..56fHC02T}}</ref>

==参考文献==
{{Reflist}}

{{钇化合物}}

[[Category:钇化合物]]
[[Category:氟氧化物]]

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