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二氯硅烷
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{{Chembox | Verifiedfields = changed | Watchedfields = changed | verifiedrevid = 444291927 | ImageFile = Dichlorosilane-2D-stereo.png | ImageFile_Ref = {{chemboximage|correct|??}} | ImageSize = 160 | ImageName = Stereo, skeletal formula of dichlorosilane with some explicit hydrogens added | ImageFileL1 = Dichlorosilane-3D-balls.png | ImageFileL1_Ref = {{chemboximage|correct|??}} | ImageNameL1 = Ball and stick model of dichlorosilane | ImageFileR1 = Dichlorosilane-3D-vdW.png | ImageFileR1_Ref = {{chemboximage|correct|??}} | ImageNameR1 = Spacefill model of dichlorosilane | IUPACName = Dichlorosilane<ref>{{Cite web|title=Nchem.403-comp13 - Compound Summary|url=http://pubchem.ncbi.nlm.nih.gov/summary/summary.cgi?cid=61330&loc=ec_rcs|work=PubChem Compound|publisher=National Center for Biotechnology Information|accessdate=30 November 2011|location=USA|date=27 March 2005|at=Identifiers and Related Records}}</ref> | OtherNames = 二氯甲硅烷 |Section1={{Chembox Identifiers | Abbreviations = DCS | CASNo = 4109-96-0 | CASNo_Ref = {{cascite|correct|CAS}} | PubChem = 61330 | ChemSpiderID = 55266 | ChemSpiderID_Ref = {{chemspidercite|correct|chemspider}} | EINECS = 223-888-3 | UNNumber = 2189 | MeSHName = dichlorosilane | RTECS = VV3050000 | SMILES = Cl[SiH2]Cl | StdInChI = 1S/Cl2H2Si/c1-3-2/h3H2 | StdInChI_Ref = {{stdinchicite|correct|chemspider}} | StdInChIKey = MROCJMGDEKINLD-UHFFFAOYSA-N | StdInChIKey_Ref = {{stdinchicite|correct|chemspider}} }} |Section2={{Chembox Properties | Formula = {{Chem|SiH|2|Cl|2}} | MolarMass = 101.007 g mol<sup>−1</sup> | Appearance = 无色气体 | MeltingPtC = −122 | BoilingPtK = 281.4 | BoilingPt_notes = at 101 kPa | Solubility = (反应) | Density = 1.22 g cm<sup>−3</sup> | VaporPressure = 167.2 kPa (at 20 °C) }} |Section3={{Chembox Thermochemistry | DeltaHf = −320.49 kJ mol<sup>−1</sup> | Entropy = 286.72 J K<sup>−1</sup> mol<sup>−1</sup> }} |Section4={{Chembox Hazards | ExternalSDS = [http://www.inchem.org/documents/icsc/icsc/eics0442.htm inchem.org] | GHSPictograms = {{GHS flame}}{{GHS corrosion}}{{GHS skull and crossbones}} | GHSSignalWord = '''DANGER''' | HPhrases = {{H-phrases|220|250|280|314|330}} | PPhrases = {{P-phrases|210|261|305+351+338|310|410+403}} | EUClass = {{Hazchem F+}} {{Hazchem T+}} | RPhrases = {{R12}}, {{R14}}, {{R26}}, {{R35}} | SPhrases = {{S26}}, {{S36/37/39}}, {{S45}}, {{S53}}, {{S60}} | NFPA-H = 4 | NFPA-F = 4 | NFPA-R = 2 | NFPA-S = W | FlashPtC = -37 | AutoignitionPtC = 55 | Autoignition_ref = <ref>http://encyclopedia.airliquide.com/Encyclopedia.asp?GasID=23</ref> | ExploLimits = 4.1–99% }} |Section5={{Chembox Related | OtherFunctn = [[氯硅烷]]<br />[[三氯硅烷]]<br />[[四氯化硅]] | OtherFunctn_label = 氯代硅烷 | OtherCompounds = [[二氯甲烷]] }} }} '''二氯硅烷''',缩写'''DCS''',是一种无机化合物,[[化学式]]为SiH<sub>2</sub>Cl<sub>2</sub>。 ==制备== 二氯硅烷可由[[硅烷]]和[[氯化氢]]按化学计量比在[[三氯化铝]]催化剂的存在下反应制备:<ref name=wj>郝润蓉,方锡义,钮少冲. 《无机化学丛书》第三卷 碳 硅 锗 分族. 北京:科学出版社, 2011. P<sub>142</sub>. 2.3 卤代硅烷(SiH<sub>''n''</sub>X<sub>4-''n''</sub>). ISBN 978-7-03-030549-7</ref> :<math>\mathrm{ SiH_4 + 2HCl \ \xrightarrow{AlCl_3, 100^oC}\ SiH_2Cl_2 + 2H_2 }</math> 它也可以利用三氯硅烷来制备:<ref name="Vor2" /> :2 SiHCl<sub>3</sub> ⇔ SiCl<sub>4</sub> + SiH<sub>2</sub>Cl<sub>2</sub> ==化学性质== 二氯硅烷遇水[[水解]],产生多聚硅氧烷(-H<sub>2</sub>Si-O-)<sub>n</sub>;和氨反应氨解,产生(-H<sub>2</sub>SiNH-)<sub>n</sub><ref name=wj />。 ==用途== 二氯硅烷可以用来做微电子里的[[半导体]][[硅]]层的起始物料,其优点是它在较低温度可以分解,并且有较高的硅晶体生长速率。<ref name="Vor2">Vorotyntsev, V., Mochalov, G., Kolotilova, M., Kinetics of Dichlorosilane Separation from a Mixture of Chlorosilanes by Distillation Using a Regular Packing, Theoretical Foundations of Chemical Engineering, 38(4), 355-359</ref> ==安全风险== 二氯硅烷是一种化学性质活泼的气体,在空气中可以迅速水解并[[自燃]]。它的毒性也很大,利用它的任何实验都需要有保护性措施。<ref name="Vor3">Vorotyntsev, V., Mochalov, G., Kolotilova, Volkova, E., Gas-Chromatographic and Mass-Spectrometric Determination of Impurity Hydrocarbons in Organochlorine Compounds and Dichlorosilane, Journal of Analytical Chemistry, 61(9), 883-888.</ref>其安全风险还包括皮肤和眼睛的刺激与吸收。<ref name="MSDS">Praxair Material Safety Data Sheet (2007)</ref> ==参考资料== {{reflist}} {{矽化合物}} [[Category:氯硅烷]]
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